CONTENTS
CONVENTIONS USED IN USER’S MANUAL....................................................................................................i
NOTES FOR EXPORTING................................................................................................................................iii
INSTALLATION CONDITIONS.........................................................................................................................iv
WARRANTY.......................................................................................................................................................v
1. INTRODUCTION...................................................................................................................................... 1-1
1.1 Outline ...........................................................................................................................................1-1
1.2 Introduction................................................................................................................................... 1-1
1.3 Inspection and Maintenance....................................................................................................... 1-2
1.3.1 Laser emission display LED............................................................................................. 1-2
1.3.2 Cleaning optical parts....................................................................................................... 1-2
1.3.3 Replacement of protection glass..................................................................................... 1-3
2. CALIBRATION ........................................................................................................................................ 2-1
2.1 Calibration Gage........................................................................................................................... 2-2
2.1.1 With-holder type ................................................................................................................ 2-2
2.1.2 Straight type....................................................................................................................... 2-2
2.1.3 Stepped type ...................................................................................................................... 2-2
3. SPECIFICATIONS OF MEASURING UNIT ............................................................................................3-1
3.1 LSM-500S ...................................................................................................................................... 3-2
3.2 LSM-501S ...................................................................................................................................... 3-4
3.3 LSM-503S ...................................................................................................................................... 3-6
3.4 LSM-506S ...................................................................................................................................... 3-8
3.5 LSM-512S .................................................................................................................................... 3-10
3.6 LSM-516S .................................................................................................................................... 3-12
4. DESIGNING THE FIXTURES.................................................................................................................. 4-1
4.1 Outline ........................................................................................................................................... 4-1
4.2 Consideration to Calibration....................................................................................................... 4-1
4.2.1 Measuring position and resulting accuracy ................................................................... 4-1
4.2.2 On measuring gap............................................................................................................. 4-2
4.3 Optical Axis Alignment................................................................................................................ 4-3
4.3.1 Optical axis alignment in horizontal plane ..................................................................... 4-3
4.3.2 Optical axis alignment in vertical plane.......................................................................... 4-3
4.3.3 Permissible error for optical axis alignment .................................................................. 4-3
4.4 Confirming the Optical Axis........................................................................................................ 4-4
4.4.1 Confirming with the laser beam....................................................................................... 4-4
No. 99MBC094A
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