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10
5.3 Field of view cleanness
Maximum diameter of defects Zone by
diameter,
mm
Neglected Permitted
Permitted total
area of defects,
mm
2
∅, mm
Qty
0 – 9.0 0.06 0.12 1 0.10
9.0 - 14.4 0.08 0.18 2 0.20
14.4 -18.0 0.10 0.20 2 0.35