3.2LSM-501S
（1）Specifications
MODEL LSM-501S
Order No. 544-534
Applicable display unit LSM-6200
Laser scanning range mm(inch) Up to 19 (.74”)
Measuring range mm(inch) 0.05 to 10 (.002” to .4”)
Resolution µm(inch) 0.01 to 10 (.000001” to .0005) [Selectable]
Repeatability [*1] µm(inch)
±0.04 (±.0000016”)[*2]
Whole range µm(inch)
±0.5 (±.00002”)[*3]
µm
±( 0.3 + 0.1 ΔD )
Linearity
[*1]
Narrow measuring
range
inch
±( .000012” + .000004” ΔD )
[*3][*4]
Positional error [*1][*5] µm(inch)
±0.5 (±.00002”)
Measuring region mm(inch)
2 × 10(.08” × .4”) (Measuring region: 0.05 to 0.1(.002” to .004”))
4 × 10 (.16” × .4”) (Measuring region: 0.1 to 10(.004” to .4”))
[Optical axis direction × Scanning direction]
Number of scans for averaging scan 1 to 2048
Laser classification
Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor
laser: wavelength 650nm)
Number of laser scans /sec 3200
Laser scanning rate m/sec(inch/sec)
113(4449”/sec)
Protection level IP64
Distance between the laser
emission unit and reception unit
mm(inch)
Standard 68(2.68”)
Max. 100 (3.93”) [*6]
Temperature
0 °C to 40 °C
Humidity 35 %RH to 85 %RH [without condensation]
Operation environment
Altitude 2000 m or less
Temperature
-15 °C to 55 °C
Storage environment
Humidity 35 %RH to 85 %RH [without condensation]
[*1]： Environment for accuracy validation: 20°C ± 1°C temperature; 50% ± 10% humidity.
[*2]： A value of ±2σ with a 10mm-diameter gage has been measured for two minutes with a measurement interval of
0.32 seconds, where σ is the standard deviation.
[*3]： The value of measurements in the center of the measurement region.
[*4]： ΔD is the difference in diameter of the workpiece and the master gage.
[*5]： Error due to the positional shift of workpiece in optical axis direction or scanning direction.
[*6]： The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy .
（2）Standard accessories
Part No. Item Qt.
―
ID unit [*7] 1
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1
[*7]： The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.
（3）Optional accessories
Order No. Item
02AGD120
Calibration gages set φ 0.1 mm φ 10 mm
02AGD210 Guide pulley unit for LSM-501H (also available for LSM-501)
02AGD230 Air-blow unit for LSM-501H (also available for LSM-501)
02AGD270 Workstage for LSM-501 / 503 / 902 (also available for LSM-501)
02AGD400 Adjustable Workstage for L SM-501(also available for LSM-501)
02AGN780A/B Extension signal cables ( 5m/10m)(16ft/32ft)[*8][*10]
02AGD150 A Extension connecting cables(1m)(3.2ft)[*9][*10]
[*8] ： The signal cable can be extended up to 20 m(64ft).
[*9] ： The connecting cable can be extended up to 2 m(6.4ft).
[*10]： The length of the
signal cable and the connecting cable other than the standard, may affect the accuracy .
No. 99MBC094A
3-4
